Buried-heterostructure mid-infrared quantum cascade lasers fabricated by non-selective regrowth and chemical polishing

A novel fabrication method of buried-heterostructure (BH) mid-infrared quantum cascade lasers (QCLs) by using non-selective regrowth of iron-doped indium phosphide (InP) (Fe:InP), around deeply etched laser ridges, via metal-organic chemical vapour deposition (MOCVD) and planarisation via chemical p...

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Bibliographic Details
Published in:Electronics letters 2015-07, Vol.51 (14), p.1098-1100
Main Authors: Chang, C.-C, Kirch, J.D, Buelow, P, Boyle, C, Kuech, T.F, Lindberg, D, Earles, T, Botez, D, Mawst, L.J
Format: Article
Language:English
Subjects:
Arrays
buried‐heterostructure mid‐infrared quantum cascade lasers
Chemical polishing
Coherence
continuous‐wave operation
deeply etched laser ridges
dielectric mask
Dielectrics
etched‐ridge sidewall profile
etching
fabrication method
heat dissipation
III‐V semiconductors
indium compounds
Indium phosphides
InP:Fe
iron
Lasers
metal‐organic chemical vapour deposition
MOCVD
nonselective regrowth
optical fabrication
Photonics
physical dimensions
planarisation
polishing
Quantum cascade lasers
Ridges
temperature 20 degC
wavelength 4.75 mum
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Summary:A novel fabrication method of buried-heterostructure (BH) mid-infrared quantum cascade lasers (QCLs) by using non-selective regrowth of iron-doped indium phosphide (InP) (Fe:InP), around deeply etched laser ridges, via metal-organic chemical vapour deposition (MOCVD) and planarisation via chemical polishing is reported. Owing to better heat dissipation, the fabricated 4.75 μm emitting QCLs exhibit about three-fold enhancement in maximum output power under continuous-wave operation at room temperature (T = 20°C) compared with that from lasers without the regrown InP. The demonstrated fabrication method provides a more flexible route to realising BH QCLs by removing strict requirements on the etched-ridge sidewall profile, as well as on the physical dimensions of the dielectric mask for the regrowth via MOCVD. The method can be further employed for making large-emitting aperture, closely packed arrays of QCLs, with planarised geometry, for coherent-power scaling.
ISSN:0013-5194
1350-911X
1350-911X
DOI:10.1049/el.2015.1094