Resolution considerations in MeV ion microscopy and lithography

There a disparity between the way the resolution is specified in microscopy and lithography using light compared to MeV ion microscopy and lithography. In this work we explore the implications of the way the resolution is defined with a view to answering the questions; how are the resolving powers i...

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Bibliographic Details
Published in:Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 2015-04, Vol.348, p.53-57
Main Authors: Norarat, Rattanaporn, Whitlow, Harry J.
Format: Article
Language:English
Subjects:
Beam interactions
Lithography
Microscopy
Modulation transfer function
Point spread functions
Resolution
Sharpness
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Summary:There a disparity between the way the resolution is specified in microscopy and lithography using light compared to MeV ion microscopy and lithography. In this work we explore the implications of the way the resolution is defined with a view to answering the questions; how are the resolving powers in MeV ion microscopy and lithography relate to their optical counterparts? and how do different forms of point spread function affect the modulation transfer function and the sharpness of the edge profile?
ISSN:0168-583X
DOI:10.1016/j.nimb.2015.01.030