CO sub(2) Laser irradiation of GeO sub(2) planar waveguide fabricated by rf-sputtering

GeO sub(2) transparent glass ceramic planar waveguides were fabricated by a RF-sputtering technique and then irradiated by a pulsed CO sub(2) laser. The effects of CO sub(2) laser processing on the optical and structural properties of the waveguides were evaluated by different techniques including m...

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Bibliographic Details
Published in:Optical materials express 2013-09, Vol.3 (9), p.1561-1570
Main Authors: Chiasera, A, Macchi, C, Mariazzi, S, Valligatla, S, Lunelli, L, Pederzolli, C, Rao, D N, Somoza, A, Brusa, R S, Ferrari, M
Format: Article
Language:English
Subjects:
Carbon dioxide lasers
Density
Germanium oxides
Irradiation
Laser beam annealing
Optical data processing
Planar waveguides
Positron annihilation spectroscopy
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Summary:GeO sub(2) transparent glass ceramic planar waveguides were fabricated by a RF-sputtering technique and then irradiated by a pulsed CO sub(2) laser. The effects of CO sub(2) laser processing on the optical and structural properties of the waveguides were evaluated by different techniques including m-line, micro-Raman spectroscopy, atomic force microscopy, and positron annihilation spectroscopy. After laser annealing, an increase of the refractive index of approximately 0.04 at 1.5 mu m and a decrease of the attenuation coefficient from 0.9 to 0.5 db/cm at 1.5 mu m was observed. Raman spectroscopy and microscopy results put in evidence that the system embeds GeO sub(2) nanocrystals and their phase varies with the irradiation time. Moreover, positron annihilation spectroscopy was used to study the depth profiling of the as prepared and laser annealed samples. The obtained results yielded information on the structural changes produced after the irradiation process inside the waveguiding films of approximately 1 mu m thickness. In addition, a density value of the amorphous GeO sub(2) samples was evaluated.
ISSN:2159-3930
2159-3930
DOI:10.1364/OME.3.001561