Phase-Engineered Synthesis of Centimeter-Scale 1T′- and 2H-Molybdenum Ditelluride Thin Films

We report the synthesis of centimeter-scale, uniform 1T′- and 2H-MoTe2 thin films via the tellurization of Mo thin films. 1T′-MoTe2 was initially grown and converted gradually to 2H-MoTe2 over a prolonged growth time under a Te atmosphere. Maintaining excessive Te was essential for obtaining the sta...

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Bibliographic Details
Published in:ACS nano 2015-06, Vol.9 (6), p.6548-6554
Main Authors: Park, Jin Cheol, Yun, Seok Joon, Kim, Hyun, Park, Ji-Hoon, Chae, Sang Hoon, An, Sung-Jin, Kim, Jeong-Gyun, Kim, Soo Min, Kim, Ki Kang, Lee, Young Hee
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Language:English
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Summary:We report the synthesis of centimeter-scale, uniform 1T′- and 2H-MoTe2 thin films via the tellurization of Mo thin films. 1T′-MoTe2 was initially grown and converted gradually to 2H-MoTe2 over a prolonged growth time under a Te atmosphere. Maintaining excessive Te was essential for obtaining the stable stoichiometric 2H-MoTe2 phase. Further annealing under a lower partial pressure of Te at the same temperature, followed by a rapid quenching, led to the reverse phase transition from 2H-MoTe2 to 1T′-MoTe2. The orientation of the 2H-MoTe2 film was determined by the tellurization rate. Slow tellurization was the key for obtaining a highly oriented 2H-MoTe2 film over the entire area, while fast tellurization led to a 2H-MoTe2 film with a randomly oriented c-axis.
ISSN:1936-0851
1936-086X
DOI:10.1021/acsnano.5b02511