Simulation of Effective Production of Very High Frequency Hydrogen Plasma Using a Balanced Power Feeding Method

The characteristics of a VHF hydrogen plasma produced by a balanced power feeding method were examined by using a two-dimensional Monte Carlo fluid hybrid model. The simulation results showed that the electron density is maximum at a certain pressure between the discharge electrodes and significantl...

Full description

Saved in:
Bibliographic Details
Published in:Japanese Journal of Applied Physics 2013-11, Vol.52 (11), p.11ND01-11ND01-5
Main Authors: Ogiwara, Kohei, Chen, Weiting, Uchino, Kiichiro, Kawai, Yoshinobu
Format: Article
Language:English
Subjects:
Balancing
Computer simulation
Electrodes
Electron density
Feeding
Gas pressure
Hydrogen plasma
Voltage
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:The characteristics of a VHF hydrogen plasma produced by a balanced power feeding method were examined by using a two-dimensional Monte Carlo fluid hybrid model. The simulation results showed that the electron density is maximum at a certain pressure between the discharge electrodes and significantly decreases outside the electrodes at a high gas pressure. The power absorption efficiency between the electrodes was improved by increasing the gas pressure. In addition, the plasma was produced efficiently between the electrodes at low applied voltages.
ISSN:0021-4922
1347-4065
1347-4065
DOI:10.7567/JJAP.52.11ND01