Rapid thermal processing of lithium tantalite thin films prepared by a diol-based sol-gel process

Lithium tantalite (LiTaO3) thin films have been deposited on Pt(111)/SiO2/Si(100) substrates by means of sol--gel spin-coating technology. Using a diol-based precursor solution and rapid thermal processing (RTP), highly c-axis oriented LiTaO3 thin films are obtained and the degree of orientation is...

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Bibliographic Details
Published in:Applied physics. A, Materials science & processing Materials science & processing, 2004-06, Vol.79 (1), p.103-108
Main Authors: KAO, M. C, CHEN, H. Z, WANG, C. M, CHEN, Y. C, LEE, M. S
Format: Article
Language:English
Subjects:
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Deposition
Dielectric constant
Dielectric loss and relaxation
Dielectric properties of solids and liquids
Dielectrics, piezoelectrics, and ferroelectrics and their properties
Exact sciences and technology
Ferroelectric materials
Ferroelectricity and antiferroelectricity
Grain size
Heating rate
Lithium
Permittivity (dielectric function)
Physics
Precursors
Pyroelectric and electrocaloric effects
Sol-gel processes
Thin films
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Summary:Lithium tantalite (LiTaO3) thin films have been deposited on Pt(111)/SiO2/Si(100) substrates by means of sol--gel spin-coating technology. Using a diol-based precursor solution and rapid thermal processing (RTP), highly c-axis oriented LiTaO3 thin films are obtained and the degree of orientation is increased with an increase of the heating rate. By changing the heating rate (600--3000 C/min) and heating temperature (500--800 C), the effects of various processing parameters on the growth of films are investigated. With the increase of heating rate, the grain size of LiTaO3 thin films decreases markedly, and the relative dielectric constant ({/content/0TMPRBY39TA6PQ50/xxlarge949.gif}r) increases from 28 up to 45.6. It was found that the dielectric loss factor (cos{/content/0TMPRBY39TA6PQ50/xxlarge948.gif}) decreased, and the ferroelectric properties were improved by the increase of heating rate. The figures of merit (Fv and Fm) indicate that the LiTaO3 thin film with a heating rate of 1800 C/min is suitable for application as a high-performance pyroelectric thin-film detector.
ISSN:0947-8396
1432-0630
DOI:10.1007/s00339-003-2493-x