Laser-induced spallation in diamond-like carbon films

Laser-induced multilevel spallation in diamond-like carbon films is observed and studied for a wide range of laser parameters ({/content/GMNX4A0E00DU0B08/xxlarge955.gif}=539, 800, 1064, and 1078 nm; {/content/GMNX4A0E00DU0B08/xxlarge964.gif}=100 fs, 300 ps, 10 ns, and 150 ns; E>0.1 J/cm). Laser i...

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Bibliographic Details
Published in:Applied physics. A, Materials science & processing Materials science & processing, 2004-08, Vol.79 (3), p.543-549
Main Authors: Kononenko, T.V., Pimenov, S.M., Kononenko, V.V., Zavedeev, E.V., Konov, V.I., Dumitru, G., Romano, V.
Format: Article
Language:English
Subjects:
Density
Diamond-like carbon films
Irradiation
Lasers
Materials science
Multilevel
Spallation
Surface layer
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Summary:Laser-induced multilevel spallation in diamond-like carbon films is observed and studied for a wide range of laser parameters ({/content/GMNX4A0E00DU0B08/xxlarge955.gif}=539, 800, 1064, and 1078 nm; {/content/GMNX4A0E00DU0B08/xxlarge964.gif}=100 fs, 300 ps, 10 ns, and 150 ns; E>0.1 J/cm). Laser irradiation causes the detachment and removal of material layers, whose lateral size is comparable with the irradiated area and whose thickness of 10--200 nm is much less than the DLC film thickness. The influence of the laser parameters on the thickness, size, and number of removed layers is examined. A qualitative explanation of laser-induced spallation in DLC films is proposed, which is based on the fact that the absorbed laser pulse produces a rapidly expanding surface layer of modified structure and reduced density.
ISSN:0947-8396
1432-0630
DOI:10.1007/s00339-003-2356-5