Mechanically compliant grating reflectors for optomechanics

We demonstrate micromechanical reflectors with a reflectivity as large as 99.4% and a mechanical quality factor Q as large as 7.8×10 5 for optomechanical applications. The reflectors are silicon nitride membranes patterned with sub-wavelength grating structures, obviating the need for the many diele...

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Bibliographic Details
Published in:Applied physics letters 2012-02, Vol.100 (6), p.061124-061124-3
Main Authors: Kemiktarak, Utku, Metcalfe, Michael, Durand, Mathieu, Lawall, John
Format: Article
Language:English
Subjects:
Diffraction gratings
Gratings (spectra)
Holes
Membranes
Optical properties
Quality factor
Reflectivity
Reflectors
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Summary:We demonstrate micromechanical reflectors with a reflectivity as large as 99.4% and a mechanical quality factor Q as large as 7.8×10 5 for optomechanical applications. The reflectors are silicon nitride membranes patterned with sub-wavelength grating structures, obviating the need for the many dielectric layers used in conventional mirrors. We have employed the reflectors in the construction of a Fabry-Perot cavity with a finesse as high as F =1200, and used the optical response to probe the mechanical properties of the membrane.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.3684248