Fabrication of high aspect ratio nanostructures on 3D surfaces

[Display omitted] A combination of different materials and processes was used to create high aspect ratio nanostructures on 3D surfaces. The high aspect ratio structures were formed on thermoplastic foils using UV-Nanoimprintlithography (UV-NIL) with a poly (dimethylsiloxane) (PDMS) stamp which was...

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Bibliographic Details
Published in:Microelectronic engineering 2011-09, Vol.88 (9), p.3043-3048
Main Authors: Senn, T., Esquivel, J.P., Sabaté, N., Löchel, B.
Format: Article
Language:English
Subjects:
3D structuring
Applied sciences
Condensed matter: structure, mechanical and thermal properties
Contact angle
Cross-disciplinary physics: materials science
rheology
Electronics
Equations of state, phase equilibria, and phase transitions
Exact sciences and technology
Foils (structural shapes)
Glass transitions
High aspect ratio
Low-dimensional structures (superlattices, quantum well structures, multilayers): structure, and nonelectronic properties
Materials science
Methods of nanofabrication
Microelectronic fabrication (materials and surfaces technology)
Nanomaterials
Nanoscale pattern formation
Nanostructure
Physics
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Specific phase transitions
Surface properties
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Thermoforming
Thermoplastic resins
Three dimensional
UV-NIL
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Summary:[Display omitted] A combination of different materials and processes was used to create high aspect ratio nanostructures on 3D surfaces. The high aspect ratio structures were formed on thermoplastic foils using UV-Nanoimprintlithography (UV-NIL) with a poly (dimethylsiloxane) (PDMS) stamp which was fabricated by soft lithography. An epoxy mixture with a higher glass transition temperature than the thermoplastic foil was used as a resist for UV-NIL. The hydrophobicity of structured substrates was characterized by the surface contact angle. Substrates with an additional chemical treatment were also produced and characterized. Results of contact angle measurement showed that superhydrophobic surface properties can be obtained with structured and chemically treated samples. The foils were further used as a substrate in a thermoforming process to transfer the structures into a microchannel. Using this process, 3D structured foils can be fabricated with high accuracy. The foils were used as a master structure for a replica molding process which allowed the fabrication of 3D structured polymer parts. With the presented method, microchannels with superhydrophobic surface properties can be fabricated.
ISSN:0167-9317
1873-5568
DOI:10.1016/j.mee.2011.05.004