Approaches to calculate the dielectric function of ZnO around the band gap

Being one of the most sensitive methods for optical thin film metrology ellipsometry is widely used for the characterization of zinc oxide (ZnO), a key material for optoelectronics, photovoltaics, and printable electronics and in a range of critical applications. The dielectric function of ZnO has a...

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Bibliographic Details
Published in:Thin solid films 2014-11, Vol.571, p.684-688
Main Authors: Agocs, E., Fodor, B., Pollakowski, B., Beckhoff, B., Nutsch, A., Jank, M., Petrik, P.
Format: Article
Language:English
Subjects:
Applied sciences
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Dielectric function
Dielectrics
Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures
Electronics
Ellipsometry
Energy
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mathematical analysis
Metrology
Molecular electronics, nanoelectronics
Natural energy
Optical instruments, equipment and techniques
Optoelectronics
Parametric dispersion model
Photovoltaic conversion
Physics
Polarimeters and ellipsometers
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Solar cells. Photoelectrochemical cells
Solar energy
Spectroscopic ellipsometry
Surface and interface electron states
Thin films
Wavelengths
Zinc oxide
ZnO
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Summary:Being one of the most sensitive methods for optical thin film metrology ellipsometry is widely used for the characterization of zinc oxide (ZnO), a key material for optoelectronics, photovoltaics, and printable electronics and in a range of critical applications. The dielectric function of ZnO has a special feature around the band gap dominated by a relatively sharp absorption feature and an excitonic peak. In this work we summarize and compare direct (point-by-point) and parametric approaches for the description of the dielectric function. We also investigate how the choice of the wavelength range influences the result, the fit quality and the sensitivity. Results on ZnO layers prepared by sputtering are presented. •Dielectric function of zinc oxide thin film measured by spectroscopic ellipsometry•Direct and parametric approaches summarized and compared•Influence of chosen wavelength range on fit results investigated
ISSN:0040-6090
1879-2731
DOI:10.1016/j.tsf.2014.03.028