Preparation of a dense TiO2 thin film by oxidizing metallic titanium

We prepared a dense rutile TiO2 thin film that has a refractive index as high as that of the bulk crystal by oxidizing metallic Ti thin film. The TiO2 thin film with a thickness of 260nm is optically transparent and has low coefficients of absorption and scattering. We annealed a Ti thin film at 100...

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Bibliographic Details
Published in:Thin solid films 2013-06, Vol.537, p.23-27
Main Authors: Yoshida, Fumiko, Tanaka, Momoko, Nagashima, Keisuke
Format: Article
Language:English
Subjects:
Annealing
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
High refractive index
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation
Optical properties of specific thin films
Oxidation
Oxidation of metal
Physics
Refractive index
Refractivity
Rutile
Structure and morphology
thickness
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Thin film structure and morphology
Thin films
Titanium
Titanium dioxide
Vapor phase epitaxy
growth from vapor phase
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Summary:We prepared a dense rutile TiO2 thin film that has a refractive index as high as that of the bulk crystal by oxidizing metallic Ti thin film. The TiO2 thin film with a thickness of 260nm is optically transparent and has low coefficients of absorption and scattering. We annealed a Ti thin film at 1000°C for oxidation and crystallization after deposition of metallic Ti by electron-beam evaporation. By optimizing the annealing conditions, we obtained a rutile TiO2 thin film with a refractive index of 2.72 at a wavelength of 1030nm, the highest refractive index ever reported. •We prepared a titanium dioxide (TiO2) thin film to obtain a high refractive index.•We annealed a Ti thin film in air and optimized the annealing conditions.•The optimized TiO2 thin film has the highest refractive index ever reported.•An unusual method of preparing a thin film was developed in this study.
ISSN:0040-6090
1879-2731
DOI:10.1016/j.tsf.2013.04.134