Investigation of the possibility of unfiltered aluminium vacuum arc plasma application for high-frequency short-pulse plasma immersion ion implantation

This paper is devoted to the study of the possibilities of unfiltered aluminium vacuum arc plasma application for intermetallic layers formation using the high-frequency short-pulse plasma immersion ion implantation method. It is shown experimentally that the number density of aluminium macroparticl...

Full description

Saved in:
Bibliographic Details
Published in:Applied surface science 2014-08, Vol.310, p.120-125
Main Authors: SIVIN, D. O, RYABCHIKOV, A. I, BUMAGINA, A. I, BOLBASOV, E. N, DANEIKINA, N. V
Format: Article
Language:rus ; eng
Subjects:
Aluminium
Aluminum
Density
Dopants
Formations
Immersion
Ion implantation
Nickel
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:This paper is devoted to the study of the possibilities of unfiltered aluminium vacuum arc plasma application for intermetallic layers formation using the high-frequency short-pulse plasma immersion ion implantation method. It is shown experimentally that the number density of aluminium macroparticles (MPs) on the substrate surface is decreased dramatically by 3 orders of magnitude when the ion-plasma substrate treatment time is increased from 30s to 3min at the bias potential -2kV. It was shown that at high intensity low energy plasma immersion implantation of Al ions in Ti and Ni substrates a deep layer (several mu m) of aluminium dopants with concentration in the range of (12-35)at% can be formed.
ISSN:0169-4332
1873-5584
DOI:10.1016/j.apsusc.2014.03.129