Antireflective subwavelength structures on microlens arrays-comparison of various manufacturing techniques

Antireflective subwavelength structures (ARS) resembling nanostructures found on the cornea of night-active insects reduce the reflection of light by providing a gradual change in the refractive index at the interface. These artificial ARS have mainly been fabricated by a combination of conventional...

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Bibliographic Details
Published in:Applied optics (2004) 2012-01, Vol.51 (1), p.8-14
Main Authors: Pacholski, Claudia, Morhard, Christoph, Spatz, Joachim P, Lehr, Dennis, Schulze, Marcel, Kley, Ernst-Bernhard, Tünnermann, Andreas, Helgert, Michael, Sundermann, Michael, Brunner, Robert
Format: Article
Language:English
Subjects:
Arrays
Insects
Lenses
Light
Lithography
Nanocomposites
Nanomaterials
Nanostructure
Nanostructures - chemistry
Nanostructures - ultrastructure
Nanotechnology - methods
Reactive ion etching
Reflection
Refractometry
Silicon Dioxide - chemistry
Spectrophotometry
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Summary:Antireflective subwavelength structures (ARS) resembling nanostructures found on the cornea of night-active insects reduce the reflection of light by providing a gradual change in the refractive index at the interface. These artificial ARS have mainly been fabricated by a combination of conventional lithography and reactive ion etching, which constrains their application to planar substrates. We report on the fabrication of ARS using three different techniques including bottom-up and top-down methods as well as their combination on microlens arrays (MLAs) made of fused silica. The optical performance of the resulting ARS on the MLAs is as good as ARS fabricated on planar substrates with increased transmission of up to 96% at certain wavelengths.
ISSN:1559-128X
2155-3165
DOI:10.1364/ao.51.000008