High Q micro-ring resonators fabricated from polycrystalline aluminum nitride films for near infrared and visible photonics

We demonstrate wideband integrated photonic circuits in sputter-deposited aluminum nitride (AlN) thin films. At both near-infrared and visible wavelengths, we achieve low propagation loss in integrated waveguides and realize high-quality optical resonators. In the telecoms C-band (1520-1580 nm), we...

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Bibliographic Details
Published in:Optics express 2012-05, Vol.20 (11), p.12261-12269
Main Authors: Pernice, Wolfram H P, Xiong, Chi, Tang, Hong X
Format: Article
Language:English
Subjects:
Aluminum Compounds - chemistry
Crystallization - methods
Equipment Design
Equipment Failure Analysis
Infrared Rays
Membranes, Artificial
Miniaturization
Optical Devices
Surface Plasmon Resonance - instrumentation
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Summary:We demonstrate wideband integrated photonic circuits in sputter-deposited aluminum nitride (AlN) thin films. At both near-infrared and visible wavelengths, we achieve low propagation loss in integrated waveguides and realize high-quality optical resonators. In the telecoms C-band (1520-1580 nm), we obtain the highest optical Q factor of 440,000. Critical coupled devices show extinction ratio above 30 dB. For visible wavelengths (around 770 nm), intrinsic quality factors in excess of 30,000 is demonstrated. Our work illustrates the potential of AlN as a low loss material for wideband optical applications.
ISSN:1094-4087
1094-4087
DOI:10.1364/oe.20.012261