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SEM-induced shrinking of solid-state nanopores for single molecule detection

We have investigated the mechanism by which the diameter of solid-state nanopores is reduced by a scanning electron microscope. The process depends on beam parameters such as the accelerating voltage and electron flux and does not involve simple electron-beam-induced deposition of hydrocarbon contam...

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Bibliographic Details
Published in:Nanotechnology 2011-10, Vol.22 (42), p.425302-1-10
Main Authors: Prabhu, Anmiv S, Freedman, Kevin J, Robertson, Joseph W F, Nikolov, Zhorro, Kasianowicz, John J, Kim, Min Jun
Format: Article
Language:English
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Summary:We have investigated the mechanism by which the diameter of solid-state nanopores is reduced by a scanning electron microscope. The process depends on beam parameters such as the accelerating voltage and electron flux and does not involve simple electron-beam-induced deposition of hydrocarbon contaminants. Instead, it is an energy-dependent process that involves material flow along the surface of the nanopore membrane. We also show that pores fabricated in this manner can detect double stranded DNA.
ISSN:0957-4484
1361-6528
DOI:10.1088/0957-4484/22/42/425302