Tip‐based Lithography with a Sacrificial Layer (Small 19/2024)

Tip‐Based LithographyIn article number 2309484, Jae‐Won Jang and co‐workers report the tip‐based lithography with a sacrificial layer. The sacrificial layer minimizes the scratching of the gold film by nano‐indentation during tip‐based lithography, which enables the fabrication of sub‐50 nm‐sized go...

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Bibliographic Details
Published in:Small (Weinheim an der Bergstrasse, Germany) Germany), 2024-05, Vol.20 (19)
Main Authors: Jo, Jeong‐Sik, Lee, Jinho, Choi, Chiwon, Jang, Jae‐Won
Format: Article
Language:English
Subjects:
Electromagnetic radiation
Gold
Lithography
Raman spectra
Scratching
Self-assembly
Wettability
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Summary:Tip‐Based LithographyIn article number 2309484, Jae‐Won Jang and co‐workers report the tip‐based lithography with a sacrificial layer. The sacrificial layer minimizes the scratching of the gold film by nano‐indentation during tip‐based lithography, which enables the fabrication of sub‐50 nm‐sized gold nanoholes. A single 20 nm diameter gold particle was trapped in a 35 nm diameter gold nanohole via wettability‐controlled self‐assembly. This structure causes strong electromagnetic wave enhancement and can be utilized in surface‐enhanced Raman scattering.
ISSN:1613-6810
1613-6829
DOI:10.1002/smll.202470148