Ru-implanted WS2 nanosheet gas sensors to enhance sensing performance towards CO gas in self-heating mode

Ru-implanted (low-dose: 2 ×1013 ions/cm2 and high-dose: 2 ×1014 ions/cm2) p-type WS2 nanosheet (NS) gas sensors were investigated for CO gas sensing in self-heating mode. X-ray photoelectron spectroscopic analysis showed that the implanted Ru existed as Ru3+ (~38 at%) and Ru4+ (~62 at%). A decrease...

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Bibliographic Details
Published in:Sensors and actuators. B, Chemical Chemical, 2022-11, Vol.370, p.132454, Article 132454
Main Authors: Kim, Jae-Hun, Sakaguchi, Isao, Hishita, Shunich, Ohsawa, Takeo, Suzuki, Taku T., Saito, Noriko
Format: Article
Language:English
Subjects:
Au decoration
Carbon monoxide
CO gas sensing
Gas sensors
Gold
Heating
Humidity
Ion implantation
Nanoparticles
Nanosheets
Photoelectrons
Relative humidity
Ru implantation
Ruthenium
Selectivity
Self-heating mode
Sensors
Tungsten disulfide
WS2 nanosheets
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Summary:Ru-implanted (low-dose: 2 ×1013 ions/cm2 and high-dose: 2 ×1014 ions/cm2) p-type WS2 nanosheet (NS) gas sensors were investigated for CO gas sensing in self-heating mode. X-ray photoelectron spectroscopic analysis showed that the implanted Ru existed as Ru3+ (~38 at%) and Ru4+ (~62 at%). A decrease of the resistivity after Ru implantation was attributed to the substitution of W4+ with Ru3+. The enhanced sensor response of the Ru-implanted (2 ×1014 ions/cm2) WS2 was attributed to the enhanced adsorption of oxygen onto the sulfur vacancies after Ru ion implantation. Decoration of Au nanoparticles (NPs) onto this gas sensor not only led to an enhancement of the response to CO gas but also improved the selectivity and dynamics of the gas sensor. The related sensing mechanism was explained in terms of the catalytic effect of Au and the spillover effect. The optimized gas sensor showed good response to CO in the presence of humidity (Rg/Ra = 3 to 50 ppm CO at 60% relative humidity, where Ra is the resistance of the sensor in air and Rg is its resistance in the presence of the target gas). •Ru ions were implanted into WS2 to improve its gas-sensing properties.•Improved oxygen adsorption due to sulfur vacancies enhanced sensor response.•Ru implantation lowered the resistivity by substituting Ru3+ for W4+.•CO gas sensing in self-heating mode was studied under applied voltages up to 5 V.•Au decoration enhanced CO selectivity and the response even when humidity is present.
ISSN:0925-4005
1873-3077
DOI:10.1016/j.snb.2022.132454