Optical properties and microstructure of ZrO2 thin films deposited by RF magnetron sputtering: case study on effects of different working temperatures

Today, there is a great interest and desire to design and build thin films with morphologies that meet different applications and needs, especially in the field of optics, surface science and surface engineering. Therefore, in this study, the effect of deposition temperature has been investigated us...

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Bibliographic Details
Published in:Optical and quantum electronics 2022-11, Vol.54 (11), Article 682
Main Authors: Shakoury, Reza, Arman, Ali, Miri, Sadegh, Mardani, Mohsen, Rezaee, Sahar, Boochani, Arash, Amraee Rad, Ghasem, Sherafat, Khalil
Format: Article
Language:English
Subjects:
Argon
Characterization and Evaluation of Materials
Computer Communication Networks
Electrical Engineering
Glass substrates
Lasers
Magnetic properties
Magnetron sputtering
Morphology
Optical Devices
Optical properties
Optics
Parameters
Photonics
Physics
Physics and Astronomy
Thin films
Zirconium dioxide
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Summary:Today, there is a great interest and desire to design and build thin films with morphologies that meet different applications and needs, especially in the field of optics, surface science and surface engineering. Therefore, in this study, the effect of deposition temperature has been investigated using surface parameters obtained from atomic force microscopy analysis (AFM) to describe surface morphology in zirconium dioxide layers (ZrO 2 ) by RF magnetron sputtering method on substrate made of glass, which are prepared in argon and oxygen gas media. These surface morphology parameters are defined in the special ISO 25178-2 standard. Besides, the transmission of optical spectra and transparency of the samples are obtained by using the optical spectrometer.
ISSN:0306-8919
1572-817X
DOI:10.1007/s11082-022-04071-2