Large-area growth of vertically aligned ZnO pillars by radio-frequency magnetron sputtering

A new method for fabricating large-area well-aligned ZnO pillars, solely using radio-frequency magnetron sputtering, is reported. A mixture of argon and hydrogen gases was used as the plasma source, acting as a reduction agent. The ZnO pillars grow from a ZnO buffer layer with a ZnMgO nucleation sta...

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Bibliographic Details

Published in:	Applied physics. A, Materials science & processing Materials science & processing, 2007-06, Vol.87 (4), p.749-753
Main Authors:	HUANG, J. H, WANG, C. Y, LIU, C. P, CHU, W. H, CHANG, Y. J
Format:	Article
Language:	eng
Subjects:	Argon Buffer layers Cross-disciplinary physics: materials science rheology Deposition by sputtering Exact sciences and technology Magnetron sputtering Materials science Methods of deposition of films and coatings film growth and epitaxy Nanotechnology devices Nucleation Photovoltaic cells Physics Radio frequency Zinc oxide
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