Patterning All‐Inorganic Halide Perovskite with Adjustable Phase for High‐Resolution Color Filter and Photodetector Arrays

Perovskite has been actively studied for optoelectronic applications, such as photodetectors and light‐emitting diodes (LEDs), because of its excellent optoelectronic properties. However, ionic bonds of the perovskite structure are vulnerable to chemicals, which makes perovskite incompatible with ph...

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Bibliographic Details
Published in:Advanced functional materials 2022-04, Vol.32 (16), p.n/a
Main Authors: Kim, Woosik, Kim, Su‐Kyung, Jeon, Sanghyun, Ahn, Junhyuk, Jung, Byung Ku, Lee, Sang Yeop, Shin, Chanho, Seong, Tae‐Yeon, Jeong, Sohee, Jang, Ho Seong, Ng, TSe Nga, Oh, Soong Ju
Format: Article
Language:English
Subjects:
Cesium
device arrays
Displays
Incompatibility
Lead compounds
Light emitting diodes
lithography
Materials science
Metal halides
Optoelectronics
Patterning
Perovskite structure
Perovskites
Photolithography
Photometers
Polymer films
Sensor arrays
Sensors
Substrates
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Summary:Perovskite has been actively studied for optoelectronic applications, such as photodetectors and light‐emitting diodes (LEDs), because of its excellent optoelectronic properties. However, ionic bonds of the perovskite structure are vulnerable to chemicals, which makes perovskite incompatible with photolithography processes that use polar solvents. Such incompatibility with photolithography hinders perovskite patterning and device integration. Here, an all‐solution based cesium lead halide perovskite (CsxPbyBrz) patterning method is introduced in which PbBr2 is patterned and then synthesized into CsxPbyBrz. Each step of the top‐down patterning process (e.g., developing, etching, and rinsing) is designed to be compatible with existing photolithography equipment. Structural, chemical, and optical analyses show that the PbBr2 pattern of (10 µm)2 squares is successfully transformed into CsPbBr3 and Cs4PbBr6 with excellent absorption and emission properties. High‐resolution photoconductor arrays and luminescent pattern arrays are fabricated with CsPbBr3 and Cs4PbBr6 on various substrates, including flexible plastic films, to demonstrate their potential applications in image sensors or displays. The research provides a fundamental understanding of the properties and growth of perovskite and promotes technological advancement by preventing degradation during the photolithography process, enabling the integration of perovskite arrays into image sensors and displays. An all‐solution based cesium lead halide perovskite patterning process with adjustable phases and optical properties is reported. With the patterning process, the high‐resolution photodetector array and luminescent patterns are demonstrated. The perovskite patterning process enables the integration of perovskites into image sensors and displays.
ISSN:1616-301X
1616-3028
DOI:10.1002/adfm.202111409