Tribological Property of ta-CNx:Ta Deposited via Ion Beam Assisted-Filtered Arc Deposition

Improving the hardness of amorphous carbon nitride with tantalum was realized by using ion beam assisted filtered arc deposition to obtain a low friction coefficient and low specific wear rate in ambient air. The coatings were prepared with different nitrogen flow during coating at different dischar...

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Bibliographic Details
Published in:Tribology international 2022-04, Vol.168, p.107450, Article 107450
Main Authors: Tokoroyama, T., Tagami, Y., Murashima, M., Lee, W.-Y., Umehara, N., Kousaka, H.
Format: Article
Language:English
Subjects:
Amorphous materials
Anti-oxidation
Arc deposition
Carbon nitride
CNx
Coatings
Coefficient of friction
Friction
Ion beams
Low friction
Mechanical properties
Raman spectroscopy
Tantalum
Tantalum doped DLC
Tantalum oxides
Tribology
Wear rate
X ray photoelectron spectroscopy
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Summary:Improving the hardness of amorphous carbon nitride with tantalum was realized by using ion beam assisted filtered arc deposition to obtain a low friction coefficient and low specific wear rate in ambient air. The coatings were prepared with different nitrogen flow during coating at different discharge cycles of tantalum. The wear scar and as-deposited surfaces were observed and analyzed by means of FESEM, AES, XPS, and Raman analysis. The lowest friction coefficient (~0.07) was obtained for ta-C:Ta200, which exhibited a low specific wear rate of
ISSN:0301-679X
1879-2464
DOI:10.1016/j.triboint.2022.107450