Ion-beam modification of metastable gallium oxide polymorphs

•Structural changes revealed in α + ε(κ)-phase Ga2O3 under Al+ ion irradiation.•Interpretation of new X-ray diffraction peaks after irradiation is twofold.•Either phase transition or strain can be ion-induced in metastable Ga2O3. Structural changes under the action of Al+ irradiation have been inves...

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Bibliographic Details
Published in:Materials letters 2021-11, Vol.302, p.130346, Article 130346
Main Authors: Tetelbaum, David, Nikolskaya, Alena, Korolev, Dmitry, Mullagaliev, Timur, Belov, Alexey, Trushin, Vladimir, Dudin, Yuri, Nezhdanov, Alexey, Mashin, Aleksandr, Mikhaylov, Alexey, Pechnikov, Alexey, Scheglov, Michael, Nikolaev, Vladimir, Gogova, Daniela
Format: Article
Language:English
Subjects:
Beta phase
Epitaxial growth
Gallium oxide
Gallium oxides
Inclusions
Ion beams
Ion implantation
Ion irradiation
Irradiation
Materials science
Metastable phases
Phase transformations
Phase transitions
Radiation-stimulated strain
Sapphire
Vapor phase epitaxy
Vapor phases
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Summary:•Structural changes revealed in α + ε(κ)-phase Ga2O3 under Al+ ion irradiation.•Interpretation of new X-ray diffraction peaks after irradiation is twofold.•Either phase transition or strain can be ion-induced in metastable Ga2O3. Structural changes under the action of Al+ irradiation have been investigated by X-ray diffraction for polymorphic Ga2O3 layers grown by halide vapor phase epitaxy on c-plane sapphire and consisting predominantly of α-phase with inclusions of ε(κ)-phase. As a result of irradiation, some new reflections appear, which can be interpreted in two ways – either as a phase transition of the α- and/or ε(κ)-phase to the more stable β-phase, or as a selective radiation-stimulated strain of the ε(κ)-phase, i.e., an increase in the interplanar distance of a family of planes parallel to the surface. The discussed ion-stimulated phenomena have to be taken into account when utilizing ion implantation to modify Ga2O3 properties.
ISSN:0167-577X
1873-4979
DOI:10.1016/j.matlet.2021.130346