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Design and development of GMR based low range pressure sensor for medical ventilator application

[Display omitted] •Low range, thermally compensated magnetic pressure sensor.•Cost effective pressure sensing technique based on giant magnetoresistive technology.•Low range sensor can be effectively used in all types of sensing media.•Prototypes exhibited equivalent performance over long period com...

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Published in:Sensors and actuators. A. Physical. 2021-04, Vol.321, p.112581, Article 112581
Main Authors: Behera, Bhagaban, Borole, Umesh P., Sivaji, Amal, Khan, Jakeer, Kumar, Pradeep, Ananda, C.M., Barshilia, Harish C., Chowdhury, P., Jadhav, Jitendra J.
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Language:English
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Summary:[Display omitted] •Low range, thermally compensated magnetic pressure sensor.•Cost effective pressure sensing technique based on giant magnetoresistive technology.•Low range sensor can be effectively used in all types of sensing media.•Prototypes exhibited equivalent performance over long period compared to commercial MEMS sensor. In this report, we present a thermally compensated low range magnetic pressure sensor. The fabricated sensor consists of a corrugated stainless steel (SS) diaphragm, a permanent magnet, a giant magnetoresistance (GMR) sensor, and a signal conditioning unit. The diaphragm with a permanent magnet produces a magnetic field which changes under the exposure of external pressure. The GMR sensor is placed asymmetrically with reference to the cylindrical axis of a magnet, which results in an output voltage proportional to external pressure. Simulations were performed to optimize the design having a linear output with higher sensitivity of the order of 14.97 μV/V/mbar, which is close to the experimentally measured value of 13 μV/V/mbar at room temperature. The sensor prototypes were fabricated in pressure ranges: ± 30 and ± 70 mbar. The fabricated pressure sensor prototypes were tested in different temperature ranges and calibrated for offset, linearity, and thermal variations using a commercial sensor signal conditioner. The performance of the calibrated sensors was evaluated at different temperatures and over an extended period. Furthermore, the performance of the sensor was experimentally evaluated in an indigenously developed medical ventilator, and compared with an existing commercial MEMS pressure sensor for a longer duration. The performance of the prototype sensor was found to be equivalent with an accuracy of ±0.1 mbar for an operation in the range of ± 30 mbar.
ISSN:0924-4247
1873-3069
DOI:10.1016/j.sna.2021.112581