Effect of the measuring mirror surface shape error on ruled groove straightness and the grating diffraction wavefront

Measuring mirror requirements and their impact on groove errors are related to the error compensation strategy for a ruling engine. We analyze why the measuring mirror of the CIOMP-6 engine affects the groove straightness and the grating diffraction wavefront. We study a theoretical model of the rel...

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Bibliographic Details
Published in:Applied optics (2004) 2020-09, Vol.59 (27), p.8465
Main Authors: Mi, Xiaotao, Zhang, Shanwen, Qi, Xiangdong, Yu, Haili, Yu, Hongzhu, Jiang, Sibo, Lin, Yu, Zhou, Jingxuan, Sun, Yeyao
Format: Article
Language:English
Subjects:
Error analysis
Error compensation
Grooves
Reprocessing
Straightness
Wave fronts
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Summary:Measuring mirror requirements and their impact on groove errors are related to the error compensation strategy for a ruling engine. We analyze why the measuring mirror of the CIOMP-6 engine affects the groove straightness and the grating diffraction wavefront. We study a theoretical model of the relationship between the measuring mirror’s surface shape error and the grating wavefront, propose a requirement for the measuring mirror surface shape error, and reprocess the measuring mirror. Comparative ruling experiments prove that the grating’s wavefront quality at the diffraction order along the groove direction improved significantly after reprocessing of the measuring mirror.
ISSN:1559-128X
2155-3165
DOI:10.1364/AO.399147