The Use of Pulsed Laser Annealing to Form Ohmic Mo/Ti Contacts to Diamond

— The influence of pulsed laser annealing on the formation of ohmic molybdenum /titanium contacts to the diamond has been studied. Using the method of secondary ion mass spectrometry, it has been shown that the laser annealing of the contacts results in the effective diffusion of carbon atoms into t...

Full description

Saved in:
Bibliographic Details
Published in:Technical physics letters 2020-06, Vol.46 (6), p.551-555
Main Authors: Drozdov, M. N., Arkhipova, E. A., Drozdov, Yu. N., Kraev, S. A., Shashkin, V. I., Parafin, A. E., Lobaev, M. A., Vikharev, A. L., Gorbachev, A. M., Radishchev, D. B., Isaev, V. A., Bogdanov, S. A.
Format: Article
Language:English
Subjects:
Adhesive strength
Annealing
Carbon
Classical and Continuum Physics
Diamonds
Diffusion layers
Graphitization
Laser beam annealing
Lasers
Molybdenum
Oxygen content
Physics
Physics and Astronomy
Pulsed lasers
Secondary ion mass spectrometry
Titanium
Titanium carbide
Titanium oxides
Transition layers
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:— The influence of pulsed laser annealing on the formation of ohmic molybdenum /titanium contacts to the diamond has been studied. Using the method of secondary ion mass spectrometry, it has been shown that the laser annealing of the contacts results in the effective diffusion of carbon atoms into the titanium layer and the formation of titanium carbide in the transition with a diamond region with a thickness of 15–20 nm. Rapid thermal annealing of the same contact system is accompanied by a sharp increase in the oxygen content in the titanium layer and the transition with a diamond layer and the appearance of titanium oxide. In this case, the titanium carbide phase is not formed in the titanium–carbon transition layer. It has been also shown that there is no graphitization of the diamond near-contact layer at the laser annealing mode used, which could have drastically reduced the mechanical strength and the adhesion of the contacts.
ISSN:1063-7850
1090-6533
DOI:10.1134/S1063785020060024