Effects of nano‐grain structures and surface defects on fracture of micro‐scaled polysilicon components

This study examines a simple fracture model for microscopically heterogeneous polysilicon components when Griffith theory applicable only to homogeneous materials fails. The strength‐limiting micro/nano‐ surface defect a0 is linked to the nano‐scaled grain size G of polysilicon and bulk fracture pro...

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Bibliographic Details
Published in:Journal of the American Ceramic Society 2020-06, Vol.103 (6), p.3757-3762
Main Authors: Xu, Ran, Hu, Xiaozhi
Format: Article
Language:English
Subjects:
Crystal defects
G ratio
Grain size
Griffith theory
nano/micro‐ surface cracks
nano‐grains
nonlinear fracture
Normal distribution
statistical reliability
Surface defects
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Summary:This study examines a simple fracture model for microscopically heterogeneous polysilicon components when Griffith theory applicable only to homogeneous materials fails. The strength‐limiting micro/nano‐ surface defect a0 is linked to the nano‐scaled grain size G of polysilicon and bulk fracture properties. Here the a0/G ratio is not large enough for polysilicon to be considered as homogeneous. Two polysilicon materials, with laminated grain structures (G = 125 nm) and columnar grain structures (G = 285 nm), have been analyzed. The simple fracture model together with a normal distribution methodology can be used to predict both the mean and 96% reliability fracture curves for the micro/nano‐crack range bridging the classic Griffith theory and the non‐linear fracture model.
ISSN:0002-7820
1551-2916
DOI:10.1111/jace.17032