Beryllium-Based Multilayer Mirrors for the Soft X-Ray and Extreme Ultraviolet Wavelength Ranges

— The latest experimental results of studying beryllium-containing multilayer mirrors are reviewed. The mirrors are of interest for projection nanolithography, solar astronomy, X-ray microscopy, and other applications. It is shown that for a number of ranges beryllium-containing multilayer mirrors o...

Full description

Bibliographic Details

Published in:	Surface investigation, x-ray, synchrotron and neutron techniques x-ray, synchrotron and neutron techniques, 2020, Vol.14 (1), p.124-134
Main Authors:	Vainer, Yu. A., Garakhin, S. A., Zuev, S. Yu, Nechay, A. N., Pleshkov, R. S., Polkovnikov, V. N., Salashchenko, N. N., Svechnikov, M. V., Sertsu, M. G., Smertin, R. M., Sokolov, A., Chkhalo, N. I., Schäfers, F.
Format:	Article
Language:	English
Subjects:	Astronomy Beryllium Chemistry and Materials Science Materials Science Multilayers Nanolithography Optical properties Soft x rays Surfaces and Interfaces Thin Films X ray microscopy
Citations:	Items that this one cites Items that cite this one
Online Access:	Get full text
Tags:	Add Tag No Tags, Be the first to tag this record!