Synthesis of the Autocorrelation Function for Solving the Thin Film Reflectometry Inverse Problem

A method is proposed to estimate (using the autocorrelation function (ACF)) the thickness of layers determining the electron density profile of a thin film. The method does not require additional conditions and is applicable to an arbitrary reflectivity curve. It is based on the ACF synthesis by a s...

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Published in:Crystallography reports 2019, Vol.64 (1), p.119-121
Main Authors: Astaf’ev, S. B., Yanusova, L. G.
Format: Article
Language:English
Subjects:
Autocorrelation functions
Correlation analysis
Crystallography and Scattering Methods
Electron density
Electron density profiles
Inverse problems
Physics
Physics and Astronomy
Reflectometry
Superposition (mathematics)
Surface and Thin Films
Synthesis
Thickness
Thin films
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Yanusova, L. G.
description A method is proposed to estimate (using the autocorrelation function (ACF)) the thickness of layers determining the electron density profile of a thin film. The method does not require additional conditions and is applicable to an arbitrary reflectivity curve. It is based on the ACF synthesis by a superposition of Gaussians, whose parameters are related to the characteristics of the film layers and interfaces. The potential of this method is demonstrated by a number of model examples.
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subjects Autocorrelation functions
Correlation analysis
Crystallography and Scattering Methods
Electron density
Electron density profiles
Inverse problems
Physics
Physics and Astronomy
Reflectometry
Superposition (mathematics)
Surface and Thin Films
Synthesis
Thickness
Thin films
title Synthesis of the Autocorrelation Function for Solving the Thin Film Reflectometry Inverse Problem
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