Synthesis of the Autocorrelation Function for Solving the Thin Film Reflectometry Inverse Problem

A method is proposed to estimate (using the autocorrelation function (ACF)) the thickness of layers determining the electron density profile of a thin film. The method does not require additional conditions and is applicable to an arbitrary reflectivity curve. It is based on the ACF synthesis by a s...

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Bibliographic Details
Published in:Crystallography reports 2019, Vol.64 (1), p.119-121
Main Authors: Astaf’ev, S. B., Yanusova, L. G.
Format: Article
Language:English
Subjects:
Autocorrelation functions
Correlation analysis
Crystallography and Scattering Methods
Electron density
Electron density profiles
Inverse problems
Physics
Physics and Astronomy
Reflectometry
Superposition (mathematics)
Surface and Thin Films
Synthesis
Thickness
Thin films
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Description
Summary:A method is proposed to estimate (using the autocorrelation function (ACF)) the thickness of layers determining the electron density profile of a thin film. The method does not require additional conditions and is applicable to an arbitrary reflectivity curve. It is based on the ACF synthesis by a superposition of Gaussians, whose parameters are related to the characteristics of the film layers and interfaces. The potential of this method is demonstrated by a number of model examples.
ISSN:1063-7745
1562-689X
DOI:10.1134/S1063774518060020