Simulation of Transient Processes in 4H-SiC Based Semiconductor Devices (Taking into Account the Incomplete Ionization of Dopants in the ATLAS Module of the SILVACO TCAD Software Package)

Transient process in a resistor–capacitor (RC) circuit with a reverse-biased 4 H -SiC p – n diode as the capacitive element is simulated. Simulation is performed with the ATLAS software module from the SILVACO TCAD system for technology computer-aided design (TCAD). An alternative way, to that in AT...

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Bibliographic Details
Published in:Semiconductors (Woodbury, N.Y.) N.Y.), 2019-03, Vol.53 (3), p.385-387
Main Authors: Ivanov, P. A., Potapov, A. S., Samsonova, T. P.
Format: Article
Language:English
Subjects:
CAD
CAD software
Capacitors
Computer aided design
Computer simulation
Doping
Dynamic characteristics
Impurities
Ionization
Magnetic Materials
Magnetism
Modules
Physics
Physics and Astronomy
Physics of Semiconductor Devices
Semiconductor devices
Semiconductors (Materials)
Silicon carbides
Silicon compounds
Software
Technology
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Summary:Transient process in a resistor–capacitor (RC) circuit with a reverse-biased 4 H -SiC p – n diode as the capacitive element is simulated. Simulation is performed with the ATLAS software module from the SILVACO TCAD system for technology computer-aided design (TCAD). An alternative way, to that in ATLAS, to set the parameters of doping impurities partly ionized in 4 H -SiC at room temperature is suggested. (The INCOMPLETE physical model available in the ATLAS module, which describes the incomplete ionization of doping impurities in semiconductors, is unsuitable for simulating the dynamic characteristics of devices.) The simulation results are discussed in relation to previously obtained experimental results.
ISSN:1063-7826
1090-6479
DOI:10.1134/S1063782619030072