XAS and TEM Study of the TiN Thin Films Grown by the Pulsed DC Sputtering Technique Assisted by Balanced Magnetron

Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006

Bibliographic Details

Published in:	Microscopy and microanalysis 2006-08, Vol.12 (S02), p.1062-1063
Main Authors:	Moller, JA Duarte, Ponce, HE Esparza, Valenzuela, C González
Format:	Article
Language:	English
Subjects:	Applications in Materials Science and Engineering
Online Access:	Get full text
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