Si Nano-Meshes Investigated Using Transmission Electron Microscopy

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Bibliographic Details

Published in:	Microscopy and microanalysis 2004-08, Vol.10 (S02), p.352-353
Main Authors:	Lian, G. D., Curtis, M. E., Larson, P. R., Hobbs, K. L., Keay, J. C., Johnson, M. B., Blom, D. A., Allard Jr, L. F.
Format:	Article
Language:	English
Subjects:	Characterization of Novel Nanostructures for Applications in Sensing, Nanoelectronics, and Biotechnology Nanostructured materials Oxidation Silicon Transmission electron microscopy
Online Access:	Get full text
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