Design of electrostatic actuators for suppressing vertical disturbances of CMOS-MEMS capacitive force sensors in bio applications

The objective of this work is to design electrostatic actuators for a CMOS-MEMS nano-newton capacitive force sensor to suppress vertical vibrations disturbances. Electrostatic actuators are selected because the movable part of this force sensor is anchored to the fixed parts. In the first step, we p...

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Bibliographic Details
Published in:Mechanics & industry : an international journal on mechanical sciences and engineering applications 2015-01, Vol.16 (3), p.306
Main Authors: Mozhdehi, Reza Jalil, Ghafari, Ali Selk, Khayyat, Amir A.A.
Format: Article
Language:English
Subjects:
Actuators
Algorithms
CMOS
CMOS-MEMS
Computer simulation
Control algorithms
Control systems design
Control theory
Design
Disturbances
Electric potential
electrostatic actuators
Finite element method
LQR controller
Mathematical analysis
Microelectromechanical systems
Modal analysis
observer
Optimization
Performance enhancement
Resonant frequencies
Sensors
Simulation
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Summary:The objective of this work is to design electrostatic actuators for a CMOS-MEMS nano-newton capacitive force sensor to suppress vertical vibrations disturbances. Electrostatic actuators are selected because the movable part of this force sensor is anchored to the fixed parts. In the first step, we propose a framework for simulation of the force sensor based on finite element method. The proposed model is modified utilizing comparison between the simulation and experimental models to improve the performance of the model. Then, 14 pairs of electrostatic actuators are designed for applying the control algorithm and their pull-in voltage is calculated. In next step, Modal Analysis is applied to find dominant natural frequencies and mode shape vectors. In addition, an observer is proposed to estimate the velocity of the modal coordinate. Finally, an optimal controller is designed employing state-space approach to suppress vertical vibration due to undesired out-of-plane excitations generated by environment during manipulation. Simulation results illustrate that employing optimum LQR control approach, the maximum out-of-plane disturbance input is suppressed less than 0.4 s with acceptable range of voltage less than pull-in voltage.
ISSN:2257-7777
2257-7750
DOI:10.1051/meca/2015008