Global dynamics and integrity of a micro-plate pressure sensor

•Global dynamics of an electrically-actuated micro pressure sensor subjected to differential pressure.•Complex bifurcation scenario with the presence of multiple instability events.•Period doubling bifurcations largely reduce the dynamical integrity of the system. This paper investigates the complex...

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Bibliographic Details
Published in:Communications in nonlinear science & numerical simulation 2019-04, Vol.69, p.432-444
Main Authors: Belardinelli, P., Sajadi, B., Lenci, S., Alijani, F.
Format: Article
Language:English
Subjects:
Basins of attraction
Bifurcations
Differential pressure
dynamical integrity
Electric potential
Integrity
micro-plate
Microelectromechanical systems
Nonlinear equations
Pressure sensors
Sensors
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Summary:•Global dynamics of an electrically-actuated micro pressure sensor subjected to differential pressure.•Complex bifurcation scenario with the presence of multiple instability events.•Period doubling bifurcations largely reduce the dynamical integrity of the system. This paper investigates the complex bifurcation scenario of electrically-actuated circular micro-plates subjected to differential pressure. Our analysis deals with the primary, secondary and ultimate saddle-node bifurcation points responsible for the device snap-through and addresses the pressure range in which the robustness of the two main stable configurations is undermined by minor coexisting attractors. By making use of basins of attraction and integrity profiles, safe dynamical regions of motion are evaluated with respect to the applied DC voltage. It is found that period-doubling bifurcations are accountable for a sensible reduction in the dynamical integrity, small variations of the DC voltage largely modify the response of the pressure sensor.
ISSN:1007-5704
1878-7274
DOI:10.1016/j.cnsns.2018.09.027