Wet-etching-assisted femtosecond laser holographic processing of a sapphire concave microlens array

We report rapid and mask-free fabrication of a sapphire concave microlens array by a combined method of femtosecond laser holographic processing and wet etching. The method features high fabrication efficiency, as crater arrays can be created on sapphire through a parallel processing manner, and the...

Full description

Saved in:
Bibliographic Details
Published in:Applied optics (2004) 2018-11, Vol.57 (32), p.9604
Main Authors: Cao, Xiao-Wen, Lu, Yi-Ming, Fan, Hua, Xia, Hong, Zhang, Lei, Zhang, Yong-Lai
Format: Article
Language:English
Subjects:
Arrays
Etching
Microlenses
Microscopes
Optical components
Parallel processing
Sapphire
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:We report rapid and mask-free fabrication of a sapphire concave microlens array by a combined method of femtosecond laser holographic processing and wet etching. The method features high fabrication efficiency, as crater arrays can be created on sapphire through a parallel processing manner, and the subsequent wet etching facilitates the formation of microlens arrays with a smooth surface. More importantly, the size and spacing of the concave microlenses can be well tuned by varying the distance of craters and etching time. Two types of microlens arrays with a spacing of 25 and 40 μm have been successfully fabricated, both of which showed good imaging performance. This method holds great promise for developing sapphire-based micro-optical components.
ISSN:1559-128X
2155-3165
DOI:10.1364/AO.57.009604