Nano Periodic Structure Formation in 4H–SiC Crystal Using Femtosecond Laser Double-Pulses

The photo-induced periodic nano structure inside 4H–SiC has been induced by a femtosecond double pulse train. The alignment of the periodic structure is in the direction independently from crystal orientation. In particular, FE-SEM analysis revealed that the periodic structure on the fractured surfa...

Full description

Saved in:
Bibliographic Details
Published in:Journal of superhard materials 2018-07, Vol.40 (4), p.259-266
Main Authors: Kim, E., Shimotsuma, Y., Sakakura, M., Miura, K.
Format: Article
Language:English
Subjects:
Chemistry
Chemistry and Materials Science
Crystal structure
Femtosecond pulses
Periodic structures
Physical Chemistry
Polarization
Production
Properties
Structure
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:The photo-induced periodic nano structure inside 4H–SiC has been induced by a femtosecond double pulse train. The alignment of the periodic structure is in the direction independently from crystal orientation. In particular, FE-SEM analysis revealed that the periodic structure on the fractured surface can be classified into two categories of the polarization-dependent and polarization-independent.
ISSN:1063-4576
1934-9408
DOI:10.3103/S1063457618040056