Pressure free nanoimprinting lithography using ladder-type HSQ material for LSPR biosensor chip

•A pressure free NIL method using a film-like thin PDMS mold is proposed.•An LSPR bio-sensor substrate holding an Au-capped nano-pillar aaray has been successfully procuded by using this method.•Using this LSPR substrate, detection limit down to 10ng/ml for IgA has been established. We present an in...

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Bibliographic Details
Published in:Sensors and actuators. B, Chemical Chemical, 2017-04, Vol.242, p.47-55
Main Authors: Jiang, Shu, Saito, Masato, Murahashi, Mizuho, Tamiya, Eiichi
Format: Article
Language:English
Subjects:
Biosensor
Biosensors
HSQ
Immunoassay
Immunoglobulins
Lithography
LSPR
Nanoparticles
Nanotechnology
NIL
Offset printing
Plates (structural members)
Polydimethylsiloxane
Sensitivity enhancement
Silicone resins
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Summary:•A pressure free NIL method using a film-like thin PDMS mold is proposed.•An LSPR bio-sensor substrate holding an Au-capped nano-pillar aaray has been successfully procuded by using this method.•Using this LSPR substrate, detection limit down to 10ng/ml for IgA has been established. We present an ingenious pressure free NIL (Nanoimprint lithography) method by simply employing a very thin PDMS mold along with a Spin-on-Glass HSQ material. Fabricating nano-patterns (i.e. nano-gratings and 2 D nano-arrays) via NIL is advantageous for LSPR based biosensors for producing large working area with high-throughput. Unlike conventional NIL and other fabrication methods, no complicated equipment is required in this work; only a simple heating plate (at 100°C) was utilized for curing time reduction. Nano-pillar structure with definition down to 50–100nm has been successfully fabricated using this method. After Au-deposition, mushroom like Au-capped nano-pillar chip has been successfully validated as a LSPR bio-sensor chip for IgA detection. In addition, this method provides promising features for higher dimensional structures fabrication which is considered as a beneficial tool for LSPR based biosensor sensitivity enhancement.
ISSN:0925-4005
1873-3077
DOI:10.1016/j.snb.2016.11.030