Nickel silicidation techniques for strained Si(1-x)Ge(x), Si(1-x-y)Ge(x)C(y) alloys material-device applications

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Bibliographic Details
Published in:Journal of electronic materials 2003-03, Vol.32 (3), p.184
Main Authors: Shi, Zhongha, Onsongo, David, Chen, Xiao, Dong-Won, Kim
Format: Article
Language:English
Online Access:Get full text
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ISSN:0361-5235
1543-186X