Impurity composition of monoisotopic 28SiF4 silicon tetrafluoride

The impurity composition of 28 SiF 4 has been studied for the first time by gas chromatography/mass spectrometry using gas-adsorption capillary columns. For identification and determination of impurity substances by gas chromatography/mass spectrometry, we have proposed using cryogenic preconcentrat...

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Bibliographic Details
Published in:Inorganic materials 2017, Vol.53 (12), p.1300-1306
Main Authors: Sorochkina, T. G., Bulanov, A. D., Sozin, A. Yu, Chernova, O. Yu
Format: Article
Language:English
Subjects:
Chemistry
Chemistry and Materials Science
Chlorine
Chromatography
Fluorine
Gas chromatography
Hydrocarbons
Impurities
Industrial Chemistry/Chemical Engineering
Inorganic Chemistry
Mass spectrometry
Materials Science
Scientific imaging
Silicon
Spectroscopy
Sulfur
Sulfur hexafluoride
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Summary:The impurity composition of 28 SiF 4 has been studied for the first time by gas chromatography/mass spectrometry using gas-adsorption capillary columns. For identification and determination of impurity substances by gas chromatography/mass spectrometry, we have proposed using cryogenic preconcentration of the impurities from 28 SiF 4 . The presence of C 2 –C 4 hydrocarbon impurities and sulfur hexafluoride has been confirmed. We have identified 35 impurity substances in 28 SiF 4 , including linear and branched C 5 –C 8 saturated hydrocarbons, aromatic hydrocarbons, chlorine- and fluorine-containing hydrocarbons, and silicon- and sulfur-containing substances, of which 28 have been detected for the first time.
ISSN:0020-1685
1608-3172
DOI:10.1134/S0020168517120160