Development and Production of Array Barrier Detectors at SCD

XB n or XB p barrier detectors exhibit diffusion-limited dark currents comparable with mercury cadmium telluride Rule-07 and high quantum efficiencies. In 2011, SemiConductor Devices (SCD) introduced “HOT Pelican D”, a 640 × 512/15- μ m pitch InAsSb/AlSbAs XB n mid-wave infrared (MWIR) detector with...

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Bibliographic Details
Published in:Journal of electronic materials 2017-09, Vol.46 (9), p.5386-5393
Main Authors: Klipstein, P. C., Avnon, E., Benny, Y., Berkowicz, E., Cohen, Y., Dobromislin, R., Fraenkel, R., Gershon, G., Glozman, A., Hojman, E., Ilan, E., Karni, Y., Klin, O., Kodriano, Y., Krasovitsky, L., Langof, L., Lukomsky, I., Nevo, I., Nitzani, M., Pivnik, I., Rappaport, N., Rosenberg, O., Shtrichman, I., Shkedy, L., Snapi, N., Talmor, R., Tessler, R., Weiss, E., Tuito, A.
Format: Article
Language:English
Subjects:
Cadmium
Characterization and Evaluation of Materials
Chemistry and Materials Science
Circuit design
Cut-off
Dark current
Diffusion barriers
Electronics and Microelectronics
Focal plane devices
Indium arsenides
Infrared detectors
Instrumentation
Intermetallic compounds
Materials Science
Mean time to failure
Mercury cadmium telluride
Noise equivalent temperature difference
Operating temperature
Optical and Electronic Materials
Pixels
Quantum efficiency
Semiconductor devices
Sensors
Silicon substrates
Solid State Physics
Tellurides
Thinning
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Summary:XB n or XB p barrier detectors exhibit diffusion-limited dark currents comparable with mercury cadmium telluride Rule-07 and high quantum efficiencies. In 2011, SemiConductor Devices (SCD) introduced “HOT Pelican D”, a 640 × 512/15- μ m pitch InAsSb/AlSbAs XB n mid-wave infrared (MWIR) detector with a 4.2- μ m cut-off and an operating temperature of ∼150 K. Its low power (∼3 W), high pixel operability (>99.5%) and long mean time to failure make HOT Pelican D a highly reliable integrated detector-cooler product with a low size, weight and power. More recently, “HOT Hercules” was launched with a 1280 × 1024/15- μ m format and similar advantages. A 3-megapixel, 10- μ m pitch version (“HOT Blackbird”) is currently completing development. For long-wave infrared applications, SCD’s 640 × 512/15- μ m pitch “Pelican-D LW” XB p type II superlattice (T2SL) detector has a ∼9.3- μ m cut-off wavelength. The detector contains InAs/GaSb and InAs/AlSb T2SLs, and is fabricated into focal plane array (FPA) detectors using standard production processes including hybridization to a digital silicon read-out integrated circuit (ROIC), glue underfill and substrate thinning. The ROIC has been designed so that the complete detector closely follows the interfaces of SCD’s MWIR Pelican-D detector family. The Pelican-D LW FPA has a quantum efficiency of ∼50%, and operates at 77 K with a pixel operability of >99% and noise equivalent temperature difference of 13 mK at 30 Hz and F/2.7.
ISSN:0361-5235
1543-186X
DOI:10.1007/s11664-017-5590-x