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High Speed TEM Sample Preparation by Xe FIB

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Bibliographic Details
Published in:Microscopy and microanalysis 2014-08, Vol.20 (S3), p.298-299
Main Authors: Delobbe, A., Salord, O., Hrncir, T., David, A., Sudraud, P., Lopour, F.
Format: Article
Language:English
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ISSN:1431-9276
1435-8115
DOI:10.1017/S1431927614003213