Phononic engineering of silicon using dots on the fly e-beam lithography and plasma etching: Nano Fabrication 2013

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Bibliographic Details
Published in:Microelectronic engineering 2014, Vol.121, p.131-134
Main Authors: LACATENA, V, HARAS, M, ROBILLARD, J.-F, MONFRAY, S, SKOTNICKI, T, DUBOIS, E
Format: Article
Language:English
Subjects:
Applied sciences
Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science
rheology
Electronics
Exact sciences and technology
Lattice dynamics
Materials science
Methods of nanofabrication
Microelectronic fabrication (materials and surfaces technology)
Nanolithography
Phonon states and bands, normal modes, and phonon dispersion
Phonons and vibrations in crystal lattices
Physics
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Surface treatments
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ISSN:0167-9317
1873-5568