Virtual control : Semiconductor factory automation

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Bibliographic Details
Published in:IEEE robotics & automation magazine 2004, Vol.11 (3), p.33-49
Main Authors: JOO, Yong-Jae, LEE, Tae-Eog
Format: Article
Language:English
Subjects:
Applied sciences
Computer science
control theory
systems
Control theory. Systems
Exact sciences and technology
Robotics
Online Access:Get full text
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ISSN:1070-9932
1558-223X