In situ and ex situ diagnostics on melting and resolidification dynamics of amorphous and polycrystalline silicon thin films during excimer laser annealing

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Bibliographic Details
Main Authors: HATANO, Mutsuko, MOON, Seungjae, LEE, Minghong, SUZUKI, Kenkichi, GRIGOROPOULOS, Costas P
Format: Conference Proceeding
Language:English
Subjects:
Exact sciences and technology
Physics
Online Access:Get full text
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ISSN:0022-3093
1873-4812