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Atomic Layer Deposition of Uniform Metal Coatings on Highly Porous Aerogel Substrates

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Bibliographic Details
Published in:Chemistry of materials 2006-12, Vol.18 (26), p.6106-6108
Main Authors: Baumann, Theodore F., Biener, Juergen, Wang, Yinmin M., Kucheyev, Sergei O., Nelson, Erik J., Satcher, Joe H., Elam, Jeffrey W., Pellin, Michael J., Hamza, Alex V.
Format: Article
Language:English
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ISSN:0897-4756
1520-5002
DOI:10.1021/cm061752g