Microcomposite and Nanocomposite Structures from Chemical Vapor Deposition in the Silicon-Titanium-Carbon System

Microcomposite and nanocomposite structures composed of SiC‐TiC and C have been prepared by chemical vapor deposition at atmospheric pressure (APCVD) from an initial gaseous mixture with the composition C4H10‐SiH2Cl2‐TiCl4‐H2. Transmission electron microscopy reveals that deposits with a nanocomposi...

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Bibliographic Details
Published in:Journal of the American Ceramic Society 1993-06, Vol.76 (6), p.1473-1481
Main Authors: Touanen, Muriel, Teyssandier, Francis, Ducarroir, Michel, Maline, Mohammed, Hillel, Roger, Derep, Jean Luc
Format: Article
Language:English
Subjects:
360601 - Other Materials- Preparation & Manufacture
360602 - Other Materials- Structure & Phase Studies
Applied sciences
Building materials. Ceramics. Glasses
CARBIDES
CARBON COMPOUNDS
Ceramic industries
CERAMICS
CHEMICAL COATING
Chemical industry and chemicals
CHEMICAL VAPOR DEPOSITION
COMPOSITE MATERIALS
CRYSTAL STRUCTURE
DATA
DEPOSITION
DISPERSIONS
Exact sciences and technology
EXPERIMENTAL DATA
INFORMATION
MATERIALS
MATERIALS SCIENCE
MICROSTRUCTURE
NUMERICAL DATA
SILICON CARBIDES
SILICON COMPOUNDS
Structural ceramics
SURFACE COATING
Technical ceramics
TITANIUM CARBIDES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
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Description
Summary:Microcomposite and nanocomposite structures composed of SiC‐TiC and C have been prepared by chemical vapor deposition at atmospheric pressure (APCVD) from an initial gaseous mixture with the composition C4H10‐SiH2Cl2‐TiCl4‐H2. Transmission electron microscopy reveals that deposits with a nanocomposite structure consist of a network of 10‐nm‐thick needles surrounded by small areas of amorphous carbon. The relative amounts of TiC and SiC as well as the microstructure depend on the SiH2Cl2 and TiCl4 content in the initial gas‐phase mixture. The variations of composition of the deposits are in good accordance with the thermodynamic calculations. Amorphous carbon is always present in the deposits. This amount can be lowered to 1 at.% at low deposition temperatures but, at such a concentration, still has a great influence on microhardness. The variation of the preferred orientation of crystals is also discussed with respect to the composition of the samples and the deposition temperature.
ISSN:0002-7820
1551-2916
DOI:10.1111/j.1151-2916.1993.tb03928.x