Structure and Electrical Properties of Zirconium-Doped Tin-Oxide Films

Thin Zr-stabilized SnO 2 films are fabricated by ion-beam reactive sputtering. The amorphous thin-film SnO 2 samples with various Zr concentrations are synthesized in a single production process. The influence of heat treatment on the structure and electrical properties of the synthesized films is s...

Full description

Saved in:
Bibliographic Details
Published in:Semiconductors (Woodbury, N.Y.) N.Y.), 2018-09, Vol.52 (9), p.1118-1122
Main Authors: Sitnikov, A. V., Zhilova, O. V., Babkina, I. V., Makagonov, V. A., Kalinin, Yu. E., Remizova, O. I.
Format: Article
Language:English
Subjects:
ACTIVATION ENERGY
CRYSTALLIZATION
DOPED MATERIALS
ELECTRICAL PROPERTIES
Heat treatment
HEAT TREATMENTS
Interfaces
ION BEAMS
Magnetic Materials
Magnetism
MATERIALS SCIENCE
Metastable phases
OXIDATION
Oxide coatings
Physics
Physics and Astronomy
Surfaces
SYNTHESIS
Temperature
TEMPERATURE RANGE 0273-0400 K
THIN FILMS
Tin dioxide
TIN OXIDES
Zirconium oxides
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Thin Zr-stabilized SnO 2 films are fabricated by ion-beam reactive sputtering. The amorphous thin-film SnO 2 samples with various Zr concentrations are synthesized in a single production process. The influence of heat treatment on the structure and electrical properties of the synthesized films is studied. The onset of crystallization in thin-film Sn–Zr–O systems is observed at 673 and 773 K, which is accompanied by the appearance of metastable phases. Being heated to 873 K, these phases are transformed into Sn + Sn 2 O 3 . It is found that the electrotransfer the film crystallization at temperatures close to room temperature is thermally activated with an activation energy of ~0.78 eV. Tin-oxide films doped with Zr from 0.6 to 3.9 at % manifest the property of hydrogen-gas sensitivity after crystallization.
ISSN:1063-7826
1090-6479
DOI:10.1134/S106378261809018X