Design and development of an in-line sputtering system and process development of thin film multilayer neutron supermirrors

Neutron supermirrors and supermirror polarizers are thin film multilayer based devices which are used for reflecting and polarizing neutrons in various neutron based experiments. In the present communication, the in-house development of a 9 m long in-line dc sputtering system has been described whic...

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Bibliographic Details
Published in:Review of scientific instruments 2014-12, Vol.85 (12), p.123103-123103
Main Authors: Biswas, A, Sampathkumar, R, Kumar, Ajaya, Bhattacharyya, D, Sahoo, N K, Lagoo, K D, Veerapur, R D, Padmanabhan, M, Puri, R K, Bhattacharya, Debarati, Singh, Surendra, Basu, S
Format: Article
Language:English
Subjects:
COMMUNICATIONS
COMPUTER CODES
CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY
DEPOSITION
DESIGN
LAYERS
Multilayers
NEUTRONS
OPTIMIZATION
PERIODICITY
Polarizers
REFLECTIVITY
Scientific apparatus & instruments
SPUTTERING
SUBSTRATES
THIN FILMS
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Summary:Neutron supermirrors and supermirror polarizers are thin film multilayer based devices which are used for reflecting and polarizing neutrons in various neutron based experiments. In the present communication, the in-house development of a 9 m long in-line dc sputtering system has been described which is suitable for deposition of neutron supermirrors on large size (1500 mm × 150 mm) substrates and in large numbers. The optimisation process of deposition of Co and Ti thin film, Co/Ti periodic multilayers, and a-periodic supermirrors have also been described. The system has been used to deposit thin film multilayer supermirror polarizers which show high reflectivity up to a reasonably large critical wavevector transfer of ∼0.06 Å(-1) (corresponding to m = 2.5, i.e., 2.5 times critical wavevector transfer of natural Ni). The computer code for designing these supermirrors has also been developed in-house.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.4902184