On the origin of the two-dimensional electron gas at AlGaN/GaN heterojunctions and its influence on recessed-gate metal-insulator-semiconductor high electron mobility transistors

It is commonly accepted that interface states at the passivation surface of AlGaN/GaN heterostructures play an important role in the formation of the 2DEG density. Several interface state models are cited throughout literature, some with discrete levels, others with different kinds of distributions,...

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Bibliographic Details
Published in:Journal of applied physics 2014-10, Vol.116 (13)
Main Authors: Bakeroot, B., You, S., Wu, T.-L., Hu, J., Van Hove, M., De Jaeger, B., Geens, K., Stoffels, S., Decoutere, S.
Format: Article
Language:English
Subjects:
ALUMINIUM COMPOUNDS
Aluminum gallium nitrides
Applied physics
CAD
Computer aided design
Computer simulation
CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY
Density
DISTRIBUTION
ELECTRON GAS
ELECTRON MOBILITY
Electrons
FIELD EFFECT TRANSISTORS
GALLIUM NITRIDES
HETEROJUNCTIONS
Heterostructures
High electron mobility transistors
HYSTERESIS
Insulators
INTERFACES
METALS
MIS (semiconductors)
MOSFET
PASSIVATION
Semiconductor devices
SEMICONDUCTOR MATERIALS
SIMULATION
SURFACES
THICKNESS
Transistors
Two dimensional models
TWO-DIMENSIONAL CALCULATIONS
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Summary:It is commonly accepted that interface states at the passivation surface of AlGaN/GaN heterostructures play an important role in the formation of the 2DEG density. Several interface state models are cited throughout literature, some with discrete levels, others with different kinds of distributions, or a combination of both. The purpose of this article is to compare the existing interface state models with both direct and indirect measurements of these interface states from literature (e.g., through the hysteresis of transfer characteristics of Metal-Insulator-Semiconductor High Electron Mobility Transistors (MISHEMTs) employing such an interface in the gate region) and Technology Computer Aided Design (TCAD) simulations of 2DEG densities as a function of the AlGaN thickness. The discrepancies between those measurements and TCAD simulations (also those commonly found in literature) are discussed. Then, an alternative model inspired by the Disorder Induced Gap State model for compound semiconductors is proposed. It is shown that defining a deep border trap inside the insulator can solve these discrepancies and that this alternative model can explain the origin of the two dimensional electron gas in combination with a high-quality interface that, by definition, has a low interface state density.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.4896900