Fourier transform infrared absorption spectroscopy characterization of gaseous atmospheric pressure plasmas with 2 mm spatial resolution

This paper describes an optical setup built to record Fourier transform infrared (FTIR) absorption spectra in an atmospheric pressure plasma with a spatial resolution of 2 mm. The overall system consisted of three basic parts: (1) optical components located within the FTIR sample compartment, making...

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Bibliographic Details
Published in:Review of scientific instruments 2012-10, Vol.83 (10), p.103508-103508
Main Authors: Laroche, G, Vallade, J, Bazinette, R, van Nijnatten, P, Hernandez, E, Hernandez, G, Massines, F
Format: Article
Language:English
Subjects:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ABSORPTION SPECTRA
ABSORPTION SPECTROSCOPY
AMMONIA
ANTIREFLECTION COATINGS
ARGON
ATMOSPHERIC PRESSURE
Beams (radiation)
CDTE SEMICONDUCTOR DETECTORS
Feasibility Studies
FOURIER TRANSFORM SPECTROMETERS
Fourier transforms
Infrared
INFRARED RADIATION
INFRARED SPECTRA
INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
INTERFACES
PLASMA
Plasma Gases - chemistry
Plasmas
PRECURSOR
Reactors
Silanes
SPATIAL RESOLUTION
SPECTROMETERS
Spectroscopy, Fourier Transform Infrared - instrumentation
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Summary:This paper describes an optical setup built to record Fourier transform infrared (FTIR) absorption spectra in an atmospheric pressure plasma with a spatial resolution of 2 mm. The overall system consisted of three basic parts: (1) optical components located within the FTIR sample compartment, making it possible to define the size of the infrared beam (2 mm × 2 mm over a path length of 50 mm) imaged at the site of the plasma by (2) an optical interface positioned between the spectrometer and the plasma reactor. Once through the plasma region, (3) a retro-reflector module, located behind the plasma reactor, redirected the infrared beam coincident to the incident path up to a 45° beamsplitter to reflect the beam toward a narrow-band mercury-cadmium-telluride detector. The antireflective plasma-coating experiments performed with ammonia and silane demonstrated that it was possible to quantify 42 and 2 ppm of these species in argon, respectively. In the case of ammonia, this was approximately three times less than this gas concentration typically used in plasma coating experiments while the silane limit of quantification was 35 times lower. Moreover, 70% of the incoming infrared radiation was focused within a 2 mm width at the site of the plasma, in reasonable agreement with the expected spatial resolution. The possibility of reaching this spatial resolution thus enabled us to measure the gaseous precursor consumption as a function of their residence time in the plasma.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.4761925